In Situ Simulation by RHEED and Photoemission of GaAs (001) β2(2x4) Reconstructed Surface
In situ monitoring of surface processes and understanding of growth processes are important in achieving precise control of crystal growth. Therefore, many surface monitoring techniques are used during crystal growth by molecular beam epitaxy (MBE). The most popular is reflection high-energy electron diffraction (RHEED) and photoemission current which provides information on the morphology during the growing surface. The photoemission oscillation technique has been successfully used in situ to monitor the growth of materials and to control the thickness as well as the roughness of the deposited layer. In this paper, we report results of atomic scale simulations used to study the dynamics of homoepitaxial growth of GaAs(001) β2(2x4) reconstructed surface and, in particular, the RHEED oscillations of the photoemission current.
Andreas Öchsner, Graeme E. Murch and João M.P.Q. Delgado
H. Khachab et al., "In Situ Simulation by RHEED and Photoemission of GaAs (001) β2(2x4) Reconstructed Surface", Defect and Diffusion Forum, Vols. 312-315, pp. 132-137, 2011