Surface Composition Transformation of Thin Film Based on Al Grown by CBE on the (001) GaAs Surface Due to Laser Assistance
It is shown that laser-assisted growth of Al films using the CBE method results in remarkable surface composition transformations. The values of the laser reflectivity are slightly correlated with the composition or with the metal thickness. The energy characteristics of the reactions guide the reflectivity changes, together with thickness changes. It was shown that the composition within the laser spot is different from that outside the laser spot due to the destruction of compounds under laser exposure.
D. V. Lioubtchenko et al., "Surface Composition Transformation of Thin Film Based on Al Grown by CBE on the (001) GaAs Surface Due to Laser Assistance", Defect and Diffusion Forum, Vols. 316-317, pp. 89-95, 2011