Compositionally Gradient Thin Film Deposition by Pulse Laser Ablation under High Gravity

Abstract:

A compositionally graded thin film of Fe/Si was fabricated by a gravity-assisted pulsed laser ablation (GAPLA) system. By this method, a compositionally graded structure along gravity direction was successfully produced under a gravity field of 5,400 G. Systematic experiments were conducted by several parameters, including gravity, distance between target and substrate, and laser fluence in case of typical target material of iron disilicide (FeSi₂). We demonstrate that the atomic fraction of Fe, the heavier component of the thin film, showed increasing spatial distribution with the direction of gravity. Relatively high laser fluence as well as a very narrow space between the target and the substrate are found to be essential to the compositionally gradient of thin film.

• Periodical: Defect and Diffusion Forum (Volumes 323-325)
• Pages: 559-563
• DOI: https://doi.org/10.4028/www.scientific.net/DDF.323-325.559
• Online since: April 2012
• Authors: Takashi Nishiyama, Takashi Kajiwara, Kunihito Nagayama
• Keywords: Compositionally Gradient Thin Film, High Gravity, Laser Ablation

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