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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 95-98Electromigration in Stressed Metal Thin Films

Electromigration in Stressed Metal Thin Films

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Diffusion in Materials - DIMAT 1992

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Periodical:

Defect and Diffusion Forum (Volumes 95-98)

Pages:

257-262

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.95-98.257

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Online since:

January 1993

Authors:

King-Ning Tu, D. Gupta

Keywords:

Effective Charge, Electromigration, Irreversible Thermodynamics, Microelectronic Devices, Stress, Thin Film

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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