Substantiation of a Technique of Determining Stress in Thin Films at Very Low Temperatures

Christopher C. Chama

doi:10.4028/www.scientific.net/JERA.14.28

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Substantiation of a Technique of Determining Stress in Thin Films at Very Low Temperatures

Abstract:

Substantiation of a technique earlier employed in determining stress in Copper-Silver thin films at very low temperatures is presented. It is shown that the stress measured at elevated temperatures using Stoney’s equation can be utilized in the determination of stress at very low temperatures. To demonstrate the application of this technique, a case study has been conducted by utilizing stress hysteresis curves obtained from the Cu-6at%Ag thin film heated from room temperature to 400°C and cooled back to room temperature in two cycles. The stresses in the Cu-6at%Ag thin film at various low temperatures up to-197°C have been determined by utilizing data from high temperature stress hysteresis curves.

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International Journal of Engineering Research in Africa Vol. 14

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International Journal of Engineering Research in Africa (Volume 14)

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28-36

DOI:

https://doi.org/10.4028/www.scientific.net/JERA.14.28

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Online since:

March 2015

Authors:

Christopher C. Chama*

Keywords:

Low Temperature Stress, Stoney’s Equation, Thin Films

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References

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