Nanoscaled C, Ni, Pt Thin Films

Abstract:

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We have investigated the growth and characteristics of nanoscaled thin films of carbon, nickel, and platinum. The nanoscaled thin films were deposited on Si and quartz substrates with or without a surface layer of carbon, nickel, or platinum using a DC magnetron sputter deposition technique. The thicknesses, which were determined using ellipsometry, are all less than 10 nm. The film structures were examined using glazing angle incident x-ray diffractometry and Raman spectroscopy. The electrical and optical properties were determined using a four point probe technique and UV-VIS-IR spectrometry, respectively.

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Periodical:

Pages:

29-34

DOI:

10.4028/www.scientific.net/JNanoR.6.29

Citation:

W. Y. Wu et al., "Nanoscaled C, Ni, Pt Thin Films", Journal of Nano Research, Vol. 6, pp. 29-34, 2009

Online since:

June 2009

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