Nanoscaled C, Ni, Pt Thin Films

Wan Yu Wu; Chia Wei Hsu; Jyh Ming Ting

doi:10.4028/www.scientific.net/JNanoR.6.29

Paper Titles

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Nanoscaled C, Ni, Pt Thin Films
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HomeJournal of Nano ResearchJournal of Nano Research Vol. 6Nanoscaled C, Ni, Pt Thin Films

Nanoscaled C, Ni, Pt Thin Films

Abstract:

We have investigated the growth and characteristics of nanoscaled thin films of carbon, nickel, and platinum. The nanoscaled thin films were deposited on Si and quartz substrates with or without a surface layer of carbon, nickel, or platinum using a DC magnetron sputter deposition technique. The thicknesses, which were determined using ellipsometry, are all less than 10 nm. The film structures were examined using glazing angle incident x-ray diffractometry and Raman spectroscopy. The electrical and optical properties were determined using a four point probe technique and UV-VIS-IR spectrometry, respectively.