The Cyclic and Continuous Oxidation of Si3N4 with and without Aluminum Implantation

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Periodical:

Key Engineering Materials (Volumes 224-226)

Edited by:

Jianghong Gong and Wei Pan

Pages:

803-806

DOI:

10.4028/www.scientific.net/KEM.224-226.803

Citation:

J. Q. Wu et al., "The Cyclic and Continuous Oxidation of Si3N4 with and without Aluminum Implantation", Key Engineering Materials, Vols. 224-226, pp. 803-806, 2002

Online since:

June 2002

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$35.00

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