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HomeKey Engineering MaterialsKey Engineering Materials Vols. 224-226The Cyclic and Continuous Oxidation of Si3N4 with...

The Cyclic and Continuous Oxidation of Si₃N₄ with and without Aluminum Implantation

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High-Performance Ceramics 2001

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Periodical:

Key Engineering Materials (Volumes 224-226)

Pages:

803-806

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.224-226.803

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Online since:

June 2002

Authors:

Jian Qing Wu, Ying Jun Wang, Jian Dong Ye, Henry H. Du

Keywords:

Ion Implantation, Oxidation, Thermal Cycle

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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