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Photo-Assisted Control of Surface Morphology of Alkoxy-Derived ZrO2 Thin Films

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Periodical:

Key Engineering Materials (Volumes 228-229)

Pages:

147-154

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.228-229.147

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Online since:

September 2002

Authors:

Kaori Nishizawa, Takeshi Miki, Kazuyuki Suzuki, Kazumi Kato

Keywords:

Metal Alkoxides, Sol-Gel Method, Surface Morphology, Uv Irradiation, ZrO2 Thin Film

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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