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HomeKey Engineering MaterialsKey Engineering Materials Vols. 228-229Impact of Two-Step Growth upon In2O3(ZnO)5 Film...

Impact of Two-Step Growth upon In₂O₃(ZnO)₅ Film Quality

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Asian Ceramic Science for Electronics II and Electroceramics in Japan V

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Periodical:

Key Engineering Materials (Volumes 228-229)

Pages:

167-172

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.228-229.167

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Online since:

September 2002

Authors:

Tsuyoshi Ogino, Naoki Ohashi, Isao Sakaguchi, Shunichi Hishita, Yutaka Adachi, Hajime Haneda

Keywords:

Doping, Homologous, Sputtering, Superlattice, Zinc Oxide (ZnO)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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