Impact of Two-Step Growth upon In2O3(ZnO)5 Film Quality

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Periodical:

Key Engineering Materials (Volumes 228-229)

Edited by:

T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki

Pages:

167-172

DOI:

10.4028/www.scientific.net/KEM.228-229.167

Citation:

T. Ogino et al., "Impact of Two-Step Growth upon In2O3(ZnO)5 Film Quality", Key Engineering Materials, Vols. 228-229, pp. 167-172, 2002

Online since:

September 2002

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Price:

$35.00

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