Effect of Thermal Annealing on the Structure and Hardness of PVD AlN(Er)

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Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

Pages:

114-117

Citation:

J.C. Oliveira et al., "Effect of Thermal Annealing on the Structure and Hardness of PVD AlN(Er)", Key Engineering Materials, Vols. 230-232, pp. 114-117, 2002

Online since:

October 2002

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$38.00

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DOI: https://doi.org/10.1016/s0022-2313(97)00010-0

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[4] - C. R. Aita, J. App. Phys., 53 (1982) 1807.

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