Effect of Thermal Annealing on the Structure and Hardness of PVD AlN(Er)

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Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

Pages:

114-117

DOI:

10.4028/www.scientific.net/KEM.230-232.114

Citation:

J.C. Oliveira et al., "Effect of Thermal Annealing on the Structure and Hardness of PVD AlN(Er)", Key Engineering Materials, Vols. 230-232, pp. 114-117, 2002

Online since:

October 2002

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$35.00

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