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HomeKey Engineering MaterialsKey Engineering Materials Vols. 230-232Effect of Thermal Annealing on the Structure and...

Effect of Thermal Annealing on the Structure and Hardness of PVD AlN(Er)

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Advanced Materials Forum I

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Periodical:

Key Engineering Materials (Volumes 230-232)

Pages:

114-117

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.114

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Online since:

October 2002

Authors:

J.C. Oliveira, Albano Cavaleiro, Maria-Teresa Freire Vieira

Keywords:

Aluminum Nitride (AlN), Annealing, Erbium, Hardness, Sputtering

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1016/s0022-2313(97)00010-0

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