Ultraprecision Fabrication of Glass Ceramic Aspherical Mirrors by ELID-Grinding with a Nano-Level Positioning Hydrostatic Drive System

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Key Engineering Materials (Volumes 238-239)

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49-52

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April 2003

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] H. Ohmori et al: Academic Lecture Meeting (JSPE), 2002, p.539.

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[2] H. Ohmori: Electrolytic in-process dressing (ELID) grinding technique for ultraprecision mirror surface machining, International journal of the JSPE, 1992, 26(4), pp.278-278.

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[3] H. Ohmori et al: Die & Mould Technology, 2002, Vol.17, No.8, pp.82-83.

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[4] H. Ohmori et al: Die & Mould Technology, 2002, Vol.17, No.3, pp.24-25. 0.54µm Fig. 7 Profile accuracy of #4000 +0.357 -64.3768 64.484 -0.357 Zerodur lens Measuring probe Fig. 6 Paraboloidal lens processing

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