[1]
J. Yan, M. Yoshino, T. Kuriyagawa, T. Shirakashi, K. Syoji and R. Komanduri: Mater. Sci. Eng. A, Vol.297, 1-2 (2001) 230.
Google Scholar
[2]
W.S. Blackly and R.O. Scattergood: Prec. Eng., Vol.13, 2 (1991) 95.
Google Scholar
[3]
T. Nakasuji, S. Kodera, S. Hara, H. Matsunaga, N. Ikawa and S. Shimada: Ann. CIRP, Vol.39, 1 (1990) 89.
DOI: 10.1016/s0007-8506(07)61009-9
Google Scholar
[4]
T.P. Leung, W.B. Lee and X.M. Lu㧦J. Mater. Proc. Tech., Vol.73 (1998) 42.
Google Scholar
[5]
C. K. Syn, et al: Proc. ASPE Spring Topical Meeting on Silicon Machining, April (1998) 44.
Google Scholar
[6]
J. Yan, K. Syoji, H. Suzuki and T. Kuriyagawa: J. Jap. Soc. Prec. Eng., Vol.64, 9, (1998) 1345.
Google Scholar
[7]
J. Yan, K. Syoji, T. Kuriyagawa and H. Suzuki: J. Mater. Proc. Tech., Vol.121/2-3, (2002), 363.
Google Scholar
[8]
D. C. OShea, Wiley, New York, 1985.
Google Scholar
[9]
H. Suzuki, T. Kitajima and S. Okuyama: J. Jap. Soc. Prec. Eng., Vol.65, 3, (1999) 401.
Google Scholar
[10]
W. B. Lee, C. F. Cheung, W. M. Chiu and T. P. Leung: J. Mater. Proc. Tech., Vol.99 (2000) 129.
Google Scholar