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HomeKey Engineering MaterialsKey Engineering Materials Vols. 240-242Reactive Species in RF Plasma Sputtering...

Reactive Species in RF Plasma Sputtering Deposition of Nanocrystalline Calcium Phosphate Bio-Active Films

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Bioceramics 15

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Key Engineering Materials (Volumes 240-242)

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307-310

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.240-242.307

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Online since:

May 2003

Authors:

S. Xu, J.D. Long, K.N. Ostrikov, H.Y. Foo

Keywords:

Bioceramic, Calcium Phosphate, Optical Emission, RF Sputtering Deposition

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[4] Jiang N: Ph.D Thesis, Nanyang Technological University, Singapore (2002).

[5] Long JD, Xu S, Cai JW, Jiang N, Lu JH, Ostrikov K, Diong CH: Mater. Sci. Eng. C Vol. 20 (2002), p.175

[6] Mahanti. Phys. Rev. Vol. 42 (1932),pp.609-22000 H2 485.6 nm PHO 487.9 nm Intensity (a.u.) H2O Flow Rate (sccm) 482 484 486 488 490 492 40000 50000 60000 70000 80000 90000 100000 110000 120000 130000 140000 120 sccm Ar 120 sccm Ar + 15 sccm H2O 100 sccm Ar + 40 sccm H2O 80 sccm Ar + 70 sccm H2O 60 sccm Ar + 105 sccm H2O 40 sccm Ar + 160 sccm H2O Intensity (a.u.) Wavelength (nm) (a) (b) Figure 6. Effect of H2O flow rate on OEI spectra (a) and on the emission of H2 and PHO (b).

DOI: 10.1109/memsys.2014.6765586