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Preparation and Semiconducting Properties of Nb-Doped-SrTiO₃ Thin Films having Controlled Crystal Orientation by MOCVD

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Electroceramics in Japan VI

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Periodical:

Key Engineering Materials (Volume 248)

Pages:

111-116

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.248.111

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Online since:

August 2003

Authors:

Atsushi Nagato, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

Keywords:

Crystal Orientation, Doping, Metal Organic Chemical Vapour Deposition, Semiconducting Properties, Strontium Titanate, Thin Film

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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