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HomeKey Engineering MaterialsKey Engineering Materials Vol. 248Control of Crystallinity of Alkoxy-Derived...

Control of Crystallinity of Alkoxy-Derived Zirconia Thin Films by UV Irradiation

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Electroceramics in Japan VI

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Periodical:

Key Engineering Materials (Volume 248)

Pages:

125-128

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.248.125

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Online since:

August 2003

Authors:

Kaori Nishizawa, Takeshi Miki, Kazuyuki Suzuki, De Sheng Fu, Kazumi Kato

Keywords:

Crystallization, Metal Alkoxide, Uv Irradiation, Wavelength Dependence, ZrO₂ Thin films

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] H. S. Choi, E. H. Kim, I. H. Choi, Y. T. Kim, J. H. Choi and J. Y. Lee, Thin Solid Films, 388, (2001), p.226.

[2] C. M. Perkins, B. B. Triplett, P. C. Mclntyre, K. C. Saraswat, S. Haukka and M. Tuominen, Appl. Phys. Lett., 78 [16], 2001, p.2357.

[3] G. L. Tan, X. J. Wu, Thin Solid Films, 330, 1998, p.59.

[4] K. Nishizawa, T. Miki, K. Suzuki, K. Kato, Key Engineering Materials, 228-229, 2002, pp.147-152.

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