Improvement of C-V Characteristics and Control of Interlayer Growth of Rare Earth Oxide Stabilized Zirconia Epitaxial Gate Dielectrics

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Edited by:

T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki

Pages:

137-142

DOI:

10.4028/www.scientific.net/KEM.248.137

Citation:

T. Kiguchi et al., "Improvement of C-V Characteristics and Control of Interlayer Growth of Rare Earth Oxide Stabilized Zirconia Epitaxial Gate Dielectrics", Key Engineering Materials, Vol. 248, pp. 137-142, 2003

Online since:

August 2003

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$35.00

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