Development and Performance Test of a Micromachined Resonant Accelerometer


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In this paper, presented are design, analysis, and experimental result of a tunable surface micromachined resonant accelerometer, ACRC-RXL. Also fabrication process of mechanical structure is illustrated. We used 40[μm] thick epitaxially grown polysilicon as structural layer and sealing area. With the exception of the CMP process, for smoothing the bonding area, the fabrication processes are simple as the conventional surface micromachining process. Experimental results show that the developed accelerometer has a performance of bias stability about 0.5mg and dynamic range over 10g.



Key Engineering Materials (Volumes 261-263)

Edited by:

Kikuo Kishimoto, Masanori Kikuchi, Tetsuo Shoji and Masumi Saka




T. S. Kang et al., "Development and Performance Test of a Micromachined Resonant Accelerometer", Key Engineering Materials, Vols. 261-263, pp. 1575-1580, 2004

Online since:

April 2004




[1] B. L. Lee, C. H. Oh, Y. S. Oh and K. Chun, “A novel resonant accelerometer; variable electrostatic stiffness type, ” Proceedings of International Conference on Solid State Sensors and Actuators, Sendai(1999) pp.1546-1549.

[2] B. L. Lee, C. H. Oh, S. Lee, Y. S. Oh and K. Chun, “A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect, ” Proceedings of the 13th International Conference on Micro Electro Mechanical Systems, Miyazaci(2000).

DOI: 10.1109/memsys.2000.838542

[3] S. Sung, J. G. Lee and T. Kang, “Development of a tunable resonant accelerometer with selfsustained oscillation loop, ” Proceedings of IEEE National Conference on Aerospace and Electronics (NAECON 2000), Dayton(2000) pp.354-361.

DOI: 10.1109/naecon.2000.894932

[4] B. H. Kim et al “A new class of surface modifier for stiction reduction, ” Proceedings of the 12th International Conference on Micro Electro Mechanical Systems, 1999 pp.189-93.

[5] S. Sung, J. G. Lee, T. Kang and J. W. Song, “Design and analysis of nonlinear feedback loop for a resonant accelerometer, ” Proceedings of European Control Conference (ECC 2001), Porto(2001) p.1906-(1911).

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