Development and Performance Test of a Micromachined Resonant Accelerometer

Tae Sam Kang; Sang Kyung Sung; Chul Hyun; Byeung Leul Lee; Jang Gyu Lee; Chan Gook Park; Young Jae Lee

doi:10.4028/www.scientific.net/KEM.261-263.1575

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 261-263Development and Performance Test of a...

Development and Performance Test of a Micromachined Resonant Accelerometer

Abstract:

In this paper, presented are design, analysis, and experimental result of a tunable surface micromachined resonant accelerometer, ACRC-RXL. Also fabrication process of mechanical structure is illustrated. We used 40[μm] thick epitaxially grown polysilicon as structural layer and sealing area. With the exception of the CMP process, for smoothing the bonding area, the fabrication processes are simple as the conventional surface micromachining process. Experimental results show that the developed accelerometer has a performance of bias stability about 0.5mg and dynamic range over 10g.

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Periodical:

Key Engineering Materials (Volumes 261-263)

Pages:

1575-1580

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.261-263.1575

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Online since:

April 2004

Authors:

Tae Sam Kang, Sang Kyung Sung, Chul Hyun, Byeung Leul Lee, Jang Gyu Lee, Chan Gook Park, Young Jae Lee

Keywords:

Accelerometer, ACRC-RXL, Surface Micromachined

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References

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