Electrical and Optical Properties of SiOC Films with Low Dielectric Constant

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Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

814-819

Citation:

Y. H. Yu et al., "Electrical and Optical Properties of SiOC Films with Low Dielectric Constant", Key Engineering Materials, Vols. 270-273, pp. 814-819, 2004

Online since:

August 2004

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DOI: https://doi.org/10.1016/s0040-6090(99)00883-4

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