Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements

Abstract:

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.

• Periodical: Key Engineering Materials (Volumes 291-292)
• Pages: 365-370
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.291-292.365
• Online since: August 2005
• Authors: Wei Min Lin, Hitoshi Ohmori, T. Suzuki, Yoshihiro Uehara, Shinya MORITA
• Keywords: CVD-SiC, ELID (ELectrolytic In-Process Dressing) Grinding, Form Accuracy, Fused Silica, Polishing, Surface Roughness (SR)

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