Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements
This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.
Yury M. Baron, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
W. M. Lin et al., "Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements", Key Engineering Materials, Vols. 291-292, pp. 365-370, 2005