Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements

Abstract:

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This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.

Info:

Periodical:

Key Engineering Materials (Volumes 291-292)

Edited by:

Yury M. Baron, Jun'ichi Tamaki and Tsunemoto Kuriyagawa

Pages:

365-370

DOI:

10.4028/www.scientific.net/KEM.291-292.365

Citation:

W. M. Lin et al., "Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements", Key Engineering Materials, Vols. 291-292, pp. 365-370, 2005

Online since:

August 2005

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Price:

$35.00

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