Ultra-Precision Finishing of Micro Aspherical Surface by Ultrasonic Vibration Assisted Polishing
Micro axis-symmetric aspherical glass lenses are being increasingly used in digital devices and optical devices. The glass lenses are molded by using micro ceramic dies such as tungsten carbide .Recently, as the pixel number of digital image sensors increases, the accuracy of micro molding dies are required to be much more precise than ever . In this study, ultrasonic assisted polishing method is proposed and developed in order to finish micro axis-symmetric aspherical dies which were pre-ground with a diamond wheel . In this paper, the proposed polishing method was applied to the micro aspherical molding dies to finish form compensation processing.
Yury M. Baron, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
H. Suzuki et al., "Ultra-Precision Finishing of Micro Aspherical Surface by Ultrasonic Vibration Assisted Polishing", Key Engineering Materials, Vols. 291-292, pp. 349-354, 2005