Ultra-Precision Finishing of Micro Aspherical Surface by Ultrasonic Vibration Assisted Polishing

Abstract:

Micro axis-symmetric aspherical glass lenses are being increasingly used in digital devices and optical devices. The glass lenses are molded by using micro ceramic dies such as tungsten carbide [1].Recently, as the pixel number of digital image sensors increases, the accuracy of micro molding dies are required to be much more precise than ever [2]. In this study, ultrasonic assisted polishing method is proposed and developed in order to finish micro axis-symmetric aspherical dies which were pre-ground with a diamond wheel [3]. In this paper, the proposed polishing method was applied to the micro aspherical molding dies to finish form compensation processing.

• Periodical: Key Engineering Materials (Volumes 291-292)
• Pages: 349-354
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.291-292.349
• Online since: August 2005
• Authors: H. Suzuki, R. Kawamori, M. Miyabara, T. Okino, Yasuto Hijikata, Y. Yamamoto, K. Nakamoto, T. Moriwaki, H. Shibutani
• Keywords: Finishing of Ground Molding Dies, Form Accuracy, Improvement of Surface Roughness, Micro Aspherical Polishing, Ultrasonic Vibration Assisted Polishing

References

[1] Suzuki, H. et al., (1998) Precision Grinding of Aspherical CVD-SiC Molding Die, Int.J. JapanSociety for Precision Engineering, Vol. 32, No. 1, 25-30.

[2] Suzuki, H. et al., (1993) Development of Off- Axis Ellipsoidal Mirrors', 7th Int, l Precision Engineering Seminar 801-812.

DOI: 10.1016/b978-0-7506-9484-1.50091-9

[3] Suzuki,H. etal, (2004) Ultraprecision Finishing of Micro Aspherical Surface by Ultrasonic Assisted Polishing, euspen 4th international conference 213-214.

[4] Suzuki, H. et al., (1998) Precision Grinding of Micro Aspheical Surface - Feasibility Study of 250 µm Aspherical Grinding -, Proceedings of Annual Meeting of the ASPE (St. Louis), Vol. 16, 149-152.