A Circular Profile Measurement Method Using Software Techniques

Abstract:

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In industry, disk type products with a highly accurate surface such as silicon wafer and hard disk, are important elements. To measure these surfaces, an interferometer is used. However, this method generally needs a highly accurate reference surface. Another method to obtain the disk surface profile is by a scanning displacement sensor. However, the output of this sensor is influenced by the parasitic motions of the scanning along the reference guide. This article presents novel measurement procedures, a reversal method, an improved reversal method and a multi-prove method, to measure the circular profile on a disk without any references but with high accuracy.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

265-270

DOI:

10.4028/www.scientific.net/KEM.295-296.265

Citation:

E. Okuyama and K. Mitsui, "A Circular Profile Measurement Method Using Software Techniques", Key Engineering Materials, Vols. 295-296, pp. 265-270, 2005

Online since:

October 2005

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Price:

$35.00

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