A Circular Profile Measurement Method Using Software Techniques
In industry, disk type products with a highly accurate surface such as silicon wafer and hard disk, are important elements. To measure these surfaces, an interferometer is used. However, this method generally needs a highly accurate reference surface. Another method to obtain the disk surface profile is by a scanning displacement sensor. However, the output of this sensor is influenced by the parasitic motions of the scanning along the reference guide. This article presents novel measurement procedures, a reversal method, an improved reversal method and a multi-prove method, to measure the circular profile on a disk without any references but with high accuracy.
Yongsheng Gao, Shuetfung Tse and Wei Gao
E. Okuyama and K. Mitsui, "A Circular Profile Measurement Method Using Software Techniques", Key Engineering Materials, Vols. 295-296, pp. 265-270, 2005