A Circular Profile Measurement Method Using Software Techniques

Eiki Okuyama; Kimiyuki Mitsui

doi:10.4028/www.scientific.net/KEM.295-296.265

Paper Titles

Automatic Laser Monitoring for Dam Safety
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An Application of the Kalman Filter in a Laser Tracking Measurement System
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A Scanning Multi-Probe Straightness Measurement System for Alignment of Linear Collider Accelerator
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Measurement of the Straightness of a Leadscrew-Driven Precision Stage
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A Circular Profile Measurement Method Using Software Techniques
p.265

A High Precision Circuit Based on Digital Techniques for Roundness Measurement
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A Circle Contour Measurement Technique Based on Randomized Hough Transform Using Gradient Information
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A Coaxiality Measurement Method for Hole Using Non-Diffracting Beam Technology
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Effects of Rotation Angle on the Circular Test of Geometric Errors
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 295-296A Circular Profile Measurement Method Using...

A Circular Profile Measurement Method Using Software Techniques

Abstract:

In industry, disk type products with a highly accurate surface such as silicon wafer and hard disk, are important elements. To measure these surfaces, an interferometer is used. However, this method generally needs a highly accurate reference surface. Another method to obtain the disk surface profile is by a scanning displacement sensor. However, the output of this sensor is influenced by the parasitic motions of the scanning along the reference guide. This article presents novel measurement procedures, a reversal method, an improved reversal method and a multi-prove method, to measure the circular profile on a disk without any references but with high accuracy.