Measurement Technology and Intelligent Instruments VI

Volumes 295-296

doi: 10.4028/

Paper Title Page

Authors: Taeho Ha, Takashi Miyoshi, Yasuhiro Takaya, S. Takahashi

Abstract: Laser scattering characteristics of typical CMP-induced defects such as particles and microscratches with the size of sub-micron order are...

Authors: Xian Ping Liu, J. Zhang

Abstract: A novel measurement system, the multi-functional Tribological Probe Microscope (TPM), has been developed to provide multi-function...

Authors: S. Takahashi, R. Nakajima, Takashi Miyoshi, Yasuhiro Takaya, Kiyoshi Takamasu

Abstract: In order to reduce and control yield loss in the fabrication process of next generation ULSI devices, nano-defects inspection technique for...

Authors: Hang Yin Ling, Alan Kin Tak Lau, Li Cheng, J. Wei, R.S. Thomson, M.L. Scott

Abstract: A comparison of strain measurement results, from an embedded fibre-optic Bragg grating (FBG) sensor and surface mounted strain gauge, at...

Authors: Evgeny S. Lukin, Alexander M. Ivanov

Abstract: A method of the thermovision study for solving the problems of the experimental mechanics is presented. The method of the experimental study...

Authors: L.H. Yam, Li Cheng, Z. Wei, Y.J. Yan

Abstract: A study on the use of modal parameter analysis for damage detection of structures made of composites is conducted. The damage-induced...

Authors: Ling Xue Kong, Z. Peng

Abstract: Nonisothermal crystallization behaviors of PVA and poly (vinyl alcohol) and Silica (PVA/SiO2) nanocomposites prepared via a self-assembly...

Authors: A.V. Vasev, S.I. Chikichev

Abstract: Structural and optical properties of MBE-grown GaAs(001) surface have been studied by reflection high-energy electron diffraction and...

Authors: Ho Chang, Chih Hung Lo, Tsing Tshih Tsung, Y.Y. Cho, D.C. Tien, Liang Chia Chen, C.H. Thai

Abstract: This study aims to investigate the temperature effect on particle size of copper oxide nanofluid produced under optimal parameters of the...

Authors: Y.M. Liu, W.J. Tian, S.J. Zhang

Abstract: The Young’s modulus of micromechanical silicon films is very different from bulk silicon structures. It is very meaningful to test Young’s...


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