Measurement Technology and Intelligent Instruments VI

Volumes 295-296

doi: 10.4028/

Paper Title Page

Authors: J. Aoki, Wei Gao, S. Kiyono, T. Ono

Abstract: This paper presents a high precision AFM for nanometrology of large area micro-structured surfaces. A PZT with a stroke of 100 microns is...

Authors: Kuang Chao Fan, Y.J. Chen

Abstract: The primary purpose of this research is to adopt a commercially available DVD pickup head and modify it to become a high-speed scanning...

Authors: N.C. Shie, T.L. Chen, Kai Yuan Cheng

Abstract: This investigation presents a fibre-optic Fabry-Perot interferometer as a displacement sensor in an atomic force microsope (AFM). A simple...

Authors: Y.H. Chen, X.J. Li, X.F. Zhou, Jia Lin Sun, W.H. Huang, J. Hu

Abstract: Mechanical properties of DNA, for example the elastic modulus, are of vital importance for its biological function. Previously, the modulus...

Authors: S.W. Hsu, T.L. Chen

Abstract: A prototype all-coil electromagnetic force balance has been designed and built. This measurement system compares the mechanical force to an...

Authors: A.P. Qiu, Y. Su, S.R. Wang, B.L. Zhou

Abstract: The design of mechanical structures depends upon characterizing the stress/strain state in these devices under the combined influence of...

Authors: H.Z. Liu, Bing Heng Lu, Y.C. Ding, D.C. Li, Yi Ping Tang, T. Jin

Abstract: A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of imprint lithography stage. To...

Authors: Yi Lun Zhu, S.R. Wang, A.P. Qiu

Abstract: The principle of operation of double-ended resonant tuning forks (DETF) is described in this paper. A new kind of DETF used in the resonant...

Authors: Qing Gang Liu, M. Li, D.C. Li, Z.G. Li, X.T. Hu

Abstract: Long range scanning stages with very small positioning errors are the key elements in the nano-CMM that is used to determine the sizes and...


Showing 11 to 20 of 123 Paper Titles