Micro Angle Measurement for a Scanning Stage

Abstract:

Long range scanning stages with very small positioning errors are the key elements in the nano-CMM that is used to determine the sizes and coordinates of micromachines and parts in three dimensions to realize MEMS/nano technology. A transmission stage needs six degree-of-freedom precision motion controls. A compact critical angle sensor (CAS) can be mounted on the base or frame to be used to monitor the orientation parameters of the scanning/transmission stage along the 3 axes and feedback the error signal of the sensor output to maintain the stage moving performance. By calibration with an autocollimator, the resolution is better than 0.1 arcsec with a measurement range above 600 arcsec.

• Periodical: Key Engineering Materials (Volumes 295-296)
• Pages: 119-124
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.295-296.119
• Online since: October 2005
• Authors: Qing Gang Liu, M. Li, D.C. Li, Z.G. Li, X.T. Hu
• Keywords: Angle Sensor, Nano-CMM, Orientation Measurements

References

[1] R. Leah and J. Haycocks et al: Nanotechnology, Vol. 12 (2001), p.1.

[2] Kiyonoshi Takamasu and Masahiko Hiraki et al: International Dimensional Metrology Workshop, Tennessee, USA, (1999).

[3] M. Holmesa and R. Hockena et al: Precision Engineering, Vol. 24 (2000), p.191.

[4] G. Jäger and E. Manske et al: ASPE 16th Annual Meeting, American Society for Precision Engineering, (2001).

[5] P.S. Huang and S. Kiyono et al: Applied Optics, Vol. 31 (1992), p.6047.

[6] Q. Liu and Z. Li et al: Journal of Optoelectronics Laser, Vol. 14 (2003), p.355.

[7] S. Liu and J. Wang: Handbook of Modern Optics (Beijing Publishing Company, Beijing 1993).