Micro Angle Measurement for a Scanning Stage

Abstract:

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Long range scanning stages with very small positioning errors are the key elements in the nano-CMM that is used to determine the sizes and coordinates of micromachines and parts in three dimensions to realize MEMS/nano technology. A transmission stage needs six degree-of-freedom precision motion controls. A compact critical angle sensor (CAS) can be mounted on the base or frame to be used to monitor the orientation parameters of the scanning/transmission stage along the 3 axes and feedback the error signal of the sensor output to maintain the stage moving performance. By calibration with an autocollimator, the resolution is better than 0.1 arcsec with a measurement range above 600 arcsec.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

119-124

DOI:

10.4028/www.scientific.net/KEM.295-296.119

Citation:

Q. G. Liu et al., "Micro Angle Measurement for a Scanning Stage", Key Engineering Materials, Vols. 295-296, pp. 119-124, 2005

Online since:

October 2005

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Price:

$35.00

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