A High Precision Dynamic Autocollimator

Abstract:

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In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of arc is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

337-342

DOI:

10.4028/www.scientific.net/KEM.295-296.337

Citation:

M.Z. Shen and S. T. Liao, "A High Precision Dynamic Autocollimator", Key Engineering Materials, Vols. 295-296, pp. 337-342, 2005

Online since:

October 2005

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Price:

$35.00

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