A High Precision Dynamic Autocollimator
In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of arc is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.
Yongsheng Gao, Shuetfung Tse and Wei Gao
M.Z. Shen and S. T. Liao, "A High Precision Dynamic Autocollimator", Key Engineering Materials, Vols. 295-296, pp. 337-342, 2005