A High Precision Dynamic Autocollimator

Abstract:

In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of arc is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.

• Periodical: Key Engineering Materials (Volumes 295-296)
• Pages: 337-342
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.295-296.337
• Online since: October 2005
• Authors: M.Z. Shen, Shu Tao Liao
• Keywords: Angular Measurement, Dynamic Autocollimator, Non-Contact Measurement, Optical Measurement

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