Development of a Sensitive Probe for Coordinate Measuring Machines

Abstract:

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Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

325-330

DOI:

10.4028/www.scientific.net/KEM.295-296.325

Citation:

M. Watanabe and R. Furutani, "Development of a Sensitive Probe for Coordinate Measuring Machines", Key Engineering Materials, Vols. 295-296, pp. 325-330, 2005

Online since:

October 2005

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Price:

$35.00

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