Advances in Micro and Nano-Scale Surface Metrology
This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.
Yongsheng Gao, Shuetfung Tse and Wei Gao
L. Blunt et al., "Advances in Micro and Nano-Scale Surface Metrology", Key Engineering Materials, Vols. 295-296, pp. 431-436, 2005