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HomeKey Engineering MaterialsKey Engineering Materials Vols. 295-296Advances in Micro and Nano-Scale Surface Metrology

Advances in Micro and Nano-Scale Surface Metrology

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Abstract:

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

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Measurement Technology and Intelligent Instruments VI

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Periodical:

Key Engineering Materials (Volumes 295-296)

Pages:

431-436

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.295-296.431

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Online since:

October 2005

Authors:

L. Blunt, X. Jiang, P.J. Scott

Keywords:

Micro Scale, Nano-Scale, Surface Characterisation

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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