Advances in Micro and Nano-Scale Surface Metrology

Abstract:

Article Preview

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

431-436

DOI:

10.4028/www.scientific.net/KEM.295-296.431

Citation:

L. Blunt et al., "Advances in Micro and Nano-Scale Surface Metrology", Key Engineering Materials, Vols. 295-296, pp. 431-436, 2005

Online since:

October 2005

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.