Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

X. Liu; Y. Gao; Suet  To; Wing Bun Lee

doi:10.4028/www.scientific.net/KEM.295-296.411

Paper Titles

A Plastic Film Thickness On-Line Detecting System
p.387

A Real-Time and On-Line Visual System for Seamless Steel Pipe Linearity Measurement
p.393

A Structured-Light-Based On-Line 3D Measurement System and Software Development
p.399

Effects of Key Parameters on the Performance of a New In-Process Optical Measurement Method
p.405

Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement
p.411

Application of Wavelet Analysis for Online Measurement of Crude Oils
p.417

On-Line Industrial 3D Measurement Techniques for Large Volume Objects
p.423

Advances in Micro and Nano-Scale Surface Metrology
p.431

2D and 3D Surface Texture Comparisons Using Autocorrelation Functions
p.437

HomeKey Engineering MaterialsKey Engineering Materials Vols. 295-296Anti-Vibration Characteristics of a Lateral Shear...

Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

Abstract:

Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.

You might also be interested in these eBooks

Measurement Technology and Intelligent Instruments VI

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Pages:

411-416

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.295-296.411

Citation:

Cite this paper

Online since:

October 2005

Authors:

X. Liu, Y. Gao, Suet To, Wing Bun Lee

Keywords:

On-Machine Measurement (OMM), Shear Interferometer, Surface Measurements

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] P. Hariharan: Opt. Eng., Vol. 36 (1997), p.2478.

Google Scholar

[2] D. Malacara: Optical Shop Testing (John Wiley & Sons Inc., New York 1992).

Google Scholar

[3] D. Xu and R.K. Ji: Opt. Eng., Vol. 30 (1991), p.391.

Google Scholar

[4] G.W.R. Leibbrandt, G. Harbers and P.J. Kunst: App. Opt., Vol. 35 (1996), p.6151.

Google Scholar

[5] S.N. Srivastava, M.S. Tomar and R.S. Kasana: Opt. Laser Technol., Vol. 22 (1990), p.283.

Google Scholar

[6] K. Iwata and H. Kikuta: Opt. Rew., Vol. 7 (2000), p.415.

Google Scholar

[7] M. Murty: App. Opt., Vol. 3 (1964), p.532.

Google Scholar

[8] S.W. Kim, W.J. Cho and B.C. Kim: Meas. Sci. Tech., Vol. 9 (1998), p.1129.

Google Scholar

[9] Y. Gao and X. Liu: Optics and Lasers in Engineering, Vol. 38 (2002), p.439.

Google Scholar

[10] J.W. Goodman: Introduction to Fourier Optics (McGraw-Hill Inc., New York 1996). 1 2 3 4 5 1, 2-sensors 3-sample 4-spindle 5-platform Fig. 7 Setup for lathe vibrating testing.

Google Scholar