Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

Abstract:

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Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

411-416

DOI:

10.4028/www.scientific.net/KEM.295-296.411

Citation:

X. Liu et al., "Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement", Key Engineering Materials, Vols. 295-296, pp. 411-416, 2005

Online since:

October 2005

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Price:

$35.00

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