Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement
Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.
Yongsheng Gao, Shuetfung Tse and Wei Gao
X. Liu et al., "Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement", Key Engineering Materials, Vols. 295-296, pp. 411-416, 2005