Development of a Large Range Nanometer Level Profilometer with Controlled Contact Force

Abstract:

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A nanometer profilometer in which the measuring force can be controlled is proposed. The key part is the nanometer profiling core, which consists of a voice coil motor with a short and movable voice coil and an inductive transducer. According to the A/D value of the transducer signal, the measuring force can be adjusted to approximately µN level by use of a PID control algorithm. The advantages of contact type and non-contact type profilometer are possessed by the proposed instrument.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

489-494

DOI:

10.4028/www.scientific.net/KEM.295-296.489

Citation:

L. Yang et al., "Development of a Large Range Nanometer Level Profilometer with Controlled Contact Force", Key Engineering Materials, Vols. 295-296, pp. 489-494, 2005

Online since:

October 2005

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Price:

$35.00

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