Development of a Large Range Nanometer Level Profilometer with Controlled Contact Force

Abstract:

A nanometer profilometer in which the measuring force can be controlled is proposed. The key part is the nanometer profiling core, which consists of a voice coil motor with a short and movable voice coil and an inductive transducer. According to the A/D value of the transducer signal, the measuring force can be adjusted to approximately µN level by use of a PID control algorithm. The advantages of contact type and non-contact type profilometer are possessed by the proposed instrument.

• Periodical: Key Engineering Materials (Volumes 295-296)
• Pages: 489-494
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.295-296.489
• Online since: October 2005
• Authors: L. Yang, Y. Gao, Xuang Ze Wang, T. Xie
• Keywords: Contact Force Control, Inductive Transducer, Measurement Force Control, Surface Profilometer, Surface Topography, Voice Coil Motor (VCM)

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