Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process

Abstract:

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In order to fabricate a microstrip band pass filter in GHz region as a passive component of RF modules, Al2O3 thick films were prepared on Cu metal substrates by AD (Aerosol Deposition) process. The dimensions of the filters were determined by the high frequency electromagnetic analysis. The filters were successfully fabricated on AD-derived Al2O3 thick films by employing sputtering, photolithography, electroplating and chemical etching processes. Their filtering characteristics were examined by a Network Analyzer. Through this work, we suggest that the AD process will be important the fabrication technology for integrated RF modules.

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Periodical:

Edited by:

Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

117-120

DOI:

10.4028/www.scientific.net/KEM.301.117

Citation:

M. Momotani et al., "Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process", Key Engineering Materials, Vol. 301, pp. 117-120, 2006

Online since:

January 2006

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Price:

$35.00

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