Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process
In order to fabricate a microstrip band pass filter in GHz region as a passive component of RF modules, Al2O3 thick films were prepared on Cu metal substrates by AD (Aerosol Deposition) process. The dimensions of the filters were determined by the high frequency electromagnetic analysis. The filters were successfully fabricated on AD-derived Al2O3 thick films by employing sputtering, photolithography, electroplating and chemical etching processes. Their filtering characteristics were examined by a Network Analyzer. Through this work, we suggest that the AD process will be important the fabrication technology for integrated RF modules.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
M. Momotani et al., "Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process", Key Engineering Materials, Vol. 301, pp. 117-120, 2006