Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process

Mihoko Momotani; Naoko Mori; Song Min Nam; Hirofumi Kakemoto; Satoshi Wada; Takaaki Tsurumi; Jun Akedo

doi:10.4028/www.scientific.net/KEM.301.117

Paper Titles

Synthesis of Thin Film by Self-Assembly of Perovskite Nanosheets
p.99

A LTCC Material with Low Temperature Coefficient of Resonance Frequency
p.105

Characteristic Design of Microwave Dielectric Materials by Using Self-Flux Compositions
p.109

Evaluation of Characteristics of Electromagnetic Wave Absorbers of Composites Fabricated by Mechanical Milling
p.113

Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process
p.117

Measurements of Microwave Dielectric Property of Dielectric Thin Layers Using Micro-Sized Planar Electrodes
p.121

Reflection Intensity Measurement for Dielectric Material Using a Microwave Single Probe and Its Electromagnetic Field Analysis
p.125

Dielectric Spectra of BaTiO₃-Based Ceramics Measured by Impedance Analyzer Using Micro Planar Electrodes
p.129

Lithium Intercalation Properties of Octatitanates Composed of Nanosheets with Various Dimensions
p.135

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Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process

Abstract:

In order to fabricate a microstrip band pass filter in GHz region as a passive component of RF modules, Al2O3 thick films were prepared on Cu metal substrates by AD (Aerosol Deposition) process. The dimensions of the filters were determined by the high frequency electromagnetic analysis. The filters were successfully fabricated on AD-derived Al2O3 thick films by employing sputtering, photolithography, electroplating and chemical etching processes. Their filtering characteristics were examined by a Network Analyzer. Through this work, we suggest that the AD process will be important the fabrication technology for integrated RF modules.