Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems
In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.
Ichsan Setya Putra and Djoko Suharto
C. D. Cho and B. H. Lee, "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems", Key Engineering Materials, Vols. 306-308, pp. 1247-1252, 2006