Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems

Chong Du Cho; Byung Ha Lee

doi:10.4028/www.scientific.net/KEM.306-308.1247

Paper Titles

Bleustein-Gulyaev Waves in an Inhomogeneous Layered Piezoelectric Half-Space
p.1223

Scattering of a Small Angle Incident Acoustic Wave from a Submerged Piezoelectric Cylinder
p.1229

Design and Analysis of Micro Electrostatic Deformable Focusing Mirror Actuated by Hemispherical Electrode
p.1235

Dynamics of a Vibrating Micro Three-Axis Ring Gyroscope
p.1241

Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems
p.1247

Development of an Oscillation Loop for a Micromachined Differential Type Resonant Accelerometer and Its Performance
p.1253

Development of a Bulk-Micromachined Single Crystal Silicon Gyroscope of Wide Operating Range at Atmospheric Pressure
p.1259

Computational Simulation of a Total Knee Prosthesis Mechanical Behaviour
p.1265

Finite Element Modeling of Cardiac Pacing/Defibrillation Lead Interaction with Heart
p.1271

HomeKey Engineering MaterialsKey Engineering Materials Vols. 306-308Analysis of Electro-Statically Driven...

Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems

Abstract:

In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.

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Periodical:

Key Engineering Materials (Volumes 306-308)

Pages:

1247-1252

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.306-308.1247

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Online since:

March 2006

Authors:

Chong Du Cho, Byung Ha Lee

Keywords:

Comb-Drive, Finite Element Model (FEM), Micro-Actuator, Micro-Electromechanical System (MEMS), Topography

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