Research on Electrochemical Micromachining System and Related Techniques
Electrochemical machining (ECM) has been rarely applied in micromachining because the electric field is not localized. In order to explore the feasibility of applying ECM to micromachining at micro to meso-scale, an experimental setup with precision control over electrochemical micromachining (EMM) was developed, which is in fact a multifunctional machine tool. The micro tool electrodes for EMM can also be fabricated by micro electrical discharge machining (EDM) on the same machine tool. A high-frequency short-pulse micro-energy MOSFET power supply was designed. Lower machining voltage and lower concentration of passivity electrolyte are utilized together to localize dissolution area in EMM. A micro hole 45 ,m in diameter was drilled by EMM on stainless steel foil with 100 μm thickness. A new approach of fabricating microstructures by means of EMM milling using a simple micro tool electrode is proposed, and a shaped hole and a micro cantilever beam with high precision were acquired by EMM milling. The satisfactory process results indicate the potential capability of EMM for higher machining accuracy and smaller machining size.
Zhejun Yuan, Xipeng Xu, Dunwen Zuo, Julong Yuan and Yingxue Yao
X. H. Li et al., "Research on Electrochemical Micromachining System and Related Techniques ", Key Engineering Materials, Vols. 315-316, pp. 731-735, 2006