Effects of Methane Concentration on Growth of Carbon Balls in Anode Nozzle and Arc Stability of DCPJ CVD Plasma Torch

Rong Fa Chen; Dun Wen Zuo; Duo Sheng Li; Bing Kun Xiang; Li Gang Zhao; Min Wang

doi:10.4028/www.scientific.net/KEM.315-316.742

Paper Titles

Study and Application on CVD Diamond Tools
p.720

Research on Influence of Crystal KDP Anisotropy on Critical Condition of Brittle-Ductile Transition in Ultra-Precision Cutting
p.725

Research on Electrochemical Micromachining System and Related Techniques
p.731

FEM Simulations on the Milling Dynamics of the Thin-Walled Structure Components
p.736

Effects of Methane Concentration on Growth of Carbon Balls in Anode Nozzle and Arc Stability of DCPJ CVD Plasma Torch
p.742

Study on the Two-Axle Bending with Elastic Roller Forming Technique of Non-Circular Cross-Section Tubular Parts Based on the Feed Force Control
p.748

Machining Simulation and Experimental Research of Complex Surface Parts Based on the PMAC
p.753

Carbon Nanotube as Probe for Atomic Force Microscope
p.758

AFM for Preparing Si Masters in Soft Lithography
p.762

HomeKey Engineering MaterialsKey Engineering Materials Vols. 315-316Effects of Methane Concentration on Growth of...

Effects of Methane Concentration on Growth of Carbon Balls in Anode Nozzle and Arc Stability of DCPJ CVD Plasma Torch

Abstract:

High quality diamond film wafers with different thickness are prepared by high power DC arc plasma jet CVD (DCPJ CVD) method using a CH4/Ar/H2 gas mixture. The effects of methane concentration on the growth of carbon balls in anode nozzle and arc stability are studied with theoretical analysis and experimental investigation. The results indicate that different sizes of carbon balls may rapidly grow in the anode nozzle with methane concentration higher than 2 Vol-%, symmetry and uniformity of the rotating arc are strongly affected with the occurrence of carbon balls, which will result in non-uniform deposition of diamond films over a large substrate area. The methane concentration should be controlled at a low level to keep diamond film wafers growth stable. Characterization by X-ray diffraction, Raman spectroscopy and SEM analysis are also carried out.

You might also be interested in these eBooks

Advances in Machining & Manufacturing Technology VIII

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 315-316)

Pages:

742-747

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.315-316.742

Citation:

Cite this paper

Online since:

July 2006

Authors:

Rong Fa Chen, Dun Wen Zuo, Duo Sheng Li, Bing Kun Xiang, Li Gang Zhao, Min Wang

Keywords:

Arc Stability, Carbon Balls in Anode Nozzle, DCPJCVD, Methane Concentration, Plasma Torch

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] A. Gicquel, K. Hassouni, F. Silva and J. Achard: Current Applied Physics., Vol. 1 (2001) No. 6, p.479.

Google Scholar

[2] F.X. Lu, G.F. Zhong and et al: Diamond and Related Material, Vol. 7 (1998) No. 6, p.737.

Google Scholar

[3] D. Friedericke and et al: Surface and Coating Technology, Vol. 119 (1999), p.428.

Google Scholar

[4] H. Guo, Z.L. Sun and et al: Diamond and Related Material, Vol. 9 (2000) No. 6, p.1673.

Google Scholar

[5] F.X. Lu, W.Z. Tang and et al: Diamond and Related Material, Vol. 10 (2001) No. 9, p.1551.

Google Scholar

[6] W.Z. Tang, G.F. Zhong and F.Z. Shen: Diamond and Related Material, Vol. 8 (1999) No. 4, p.211.

Google Scholar

[7] D. W. Zuo, S.L. Song and et al: Key Engineering Material, Vol. 258-259 (2004), p.517.

Google Scholar

[8] G.H. Li, F.X. Lu and et al : Chinese Patent CN1099547A.

Google Scholar

[9] T.B. Huang, J.M. Liu and et al: Journal of University of Science and Technology. Beijing, Vol. 22 (2000) No. 5, p.467.

Google Scholar

[10] S.L. Song, D.W. Zuo and et al: Journal of Applied Science, Vol. 21 (2003) No. 4, p.423.

Google Scholar

[11] H.Q. Li, G.F. Zhong and et al: Journal of University of Science and Technology. Beijing, Vol. 16 (1994) No. 6, p.547.

Google Scholar