Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Yan Shen Wang; Shen Dong; Yan Qiang Yang; Ying Chun Liang; Y.H. Wang

doi:10.4028/www.scientific.net/KEM.315-316.779

Paper Titles

AFM for Preparing Si Masters in Soft Lithography
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Effects of the Substrate on the Determination of SEBS Thin Film Mechanical Properties by Nanoindentation
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Grains Ultra-Refinement of Materials Imposed by Pulse Laser
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A Suspending Abrasives and Porous Pad Model for the Analysis of Lubrication in Chemical Mechanical Polishing
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Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer
p.779

Investigation on Adhesion Work and Its Effects on Micro Friction
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Precision Gravity Center Position Measurement System for Heavy Vehicles
p.788

Study on Nanometric Machining Process of Monocrystalline Si
p.792

Measurement of Roundness and Sphericity of the Micro Sphere Based on Atomic Force Microscope
p.796

HomeKey Engineering MaterialsKey Engineering Materials Vols. 315-316Research on Periodic Structures Aroused by...

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Abstract:

Ripples in the area of femtosecond laser irradiated discrete points and continuous lines were studied. The characteristics of interference-induced ripples (LSFL) in the area irradiated by single shot were investigated by AFM. During single point irradiation, morphology of the irradiated area changed with energy deposition. Morphologies of the irradiated continuous lines with and without ablated groove inside were both investigated. The intensity of interfered light waves varied in different positions of each energy stripes. Thus the characteristics of ripples in the irradiated area varied with different positions. Ripples much larger than LSFL were found perpendicular to laser polarization.

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Key Engineering Materials (Volumes 315-316)

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779-783

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.315-316.779

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Online since:

July 2006

Authors:

Yan Shen Wang, Shen Dong, Yan Qiang Yang, Ying Chun Liang, Y.H. Wang

Keywords:

Femtosecond Laser, Periodic Surface Structures, Single Crystalline Silicon

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