Three-Dimensional Micromachining Based on AFM

Z.J. Hu; S.G. Zhang; Xiu Hua Zheng; Yong Da Yan; T. Sun; Qing Liang Zhao; Shen Dong

doi:10.4028/www.scientific.net/KEM.315-316.800

Paper Titles

Investigation on Adhesion Work and Its Effects on Micro Friction
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Precision Gravity Center Position Measurement System for Heavy Vehicles
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Study on Nanometric Machining Process of Monocrystalline Si
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Measurement of Roundness and Sphericity of the Micro Sphere Based on Atomic Force Microscope
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Three-Dimensional Micromachining Based on AFM
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A Study of Precision Sub-Dry Cutting Mechanism
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A Research of Image-Based Visual Control in Microassembly under a Microscope
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Study on the Compound Fuzzy Motion Control for the Ultra Precision Machine Tools
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Fast Positioning Technology of High Acceleration Stage
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 315-316Three-Dimensional Micromachining Based on AFM

Three-Dimensional Micromachining Based on AFM

Abstract:

With the development of science and technology, Atomic Force Microscope is widely applied to the field of machining process in nanometer scale. Due to the limitation of the inventive purpose of AFM, only height mode and deflection mode can be applied in AFM-tip micromachining. It can’t control the machining depth during the micromachining process at present. In this paper, a new micromachining system is set up, which composed of a high precision three-dimensional stage, an AFM, a diamond probe and a special control device. By utilizing variation parameters PID algorithm and controlling the machining depth directly, the micromachining system can resolve the problem mentioned above.