A Correction of Geometric Error of Nano-Indenter Using Atomic Force Microscope and Finite Element Method
In this study, we investigated indentation behavior by varying the tip radius in a finite element model. We measured the tip radius and shape of the nano-indenter by SPM (scanning probe microscope) and compared them with the simulation results. The tip radius of cube corner indenter was measured to be 39nm, in agreement with the common tip radius of such indenters, which range from 20~50nm.
Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi
S. Baek et al., "A Correction of Geometric Error of Nano-Indenter Using Atomic Force Microscope and Finite Element Method", Key Engineering Materials, Vols. 321-323, pp. 129-131, 2006