A Correction of Geometric Error of Nano-Indenter Using Atomic Force Microscope and Finite Element Method

Abstract:

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In this study, we investigated indentation behavior by varying the tip radius in a finite element model. We measured the tip radius and shape of the nano-indenter by SPM (scanning probe microscope) and compared them with the simulation results. The tip radius of cube corner indenter was measured to be 39nm, in agreement with the common tip radius of such indenters, which range from 20~50nm.

Info:

Periodical:

Key Engineering Materials (Volumes 321-323)

Edited by:

Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi

Pages:

129-131

DOI:

10.4028/www.scientific.net/KEM.321-323.129

Citation:

S. Baek et al., "A Correction of Geometric Error of Nano-Indenter Using Atomic Force Microscope and Finite Element Method", Key Engineering Materials, Vols. 321-323, pp. 129-131, 2006

Online since:

October 2006

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Price:

$35.00

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