Measurement of Carboxyl Group Separated from a Thin Film Copolymerized by Low-Temperature Plasma at Atmospheric Pressure of C2H2 and CO2
We developed a device that makes possible the normal generation of low-temperature plasma under atmospheric pressure. For plasma generation, a radio frequency of rf (13.56 MHz) was used, for plasma gas, helium (He), and for material gases, acetylene (C2H2) and toluene (C6H5CH3) were used. As a result of measuring Fourier transform infrared (FT-IR) after adding the CO2 gas to the generated plasma, the absorption of C=O (carboxyl group) was observed around 1715 cm-1. When the flow rates of the added CO2 increased, the absorption peak increased at the same time, and we knew that this originated from the CO2 molecules.
Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi
H. L. Sohn et al., "Measurement of Carboxyl Group Separated from a Thin Film Copolymerized by Low-Temperature Plasma at Atmospheric Pressure of C2H2 and CO2", Key Engineering Materials, Vols. 321-323, pp. 1332-1335, 2006