As depositing layers with different thermal expansion coefficients, the residual gradient stress will cause the structure deformed. The deformation of structure in the free ending, middle section, and clamped end are detail investigated. It is found the clamped end often has complex deformation shape. The warpage due to buckling is found. The results show if the thickness of structure is much larger than above deposing layer, warpage will hardly happen and the free ending will have more flat region. As the thickness of structure layer being not much larger than above deposing layer, the warpage happens and the free ending is parabolic shape. In the clamped end, the complex deformation even is concave shape in the center part but protruding shape in the side region. The larger temperature difference will be more easily warpage and be no more flat. The results also show that as the ratio of length to width decreasing, seriously warpage and complex deformation happens. The free ending may be a little protruding shape. However, if the ratio of length to width is larger, the free ending will have concave shape.