Physical Modeling and Characteristics of a Johnsen-Rahbek Type Electrostatic Chuck

Abstract:

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Generally, a Johnsen-Rahbek (J-R) type electrostatic chuck (ESC) generates higher attractive force than a Coulomb type ESC. Attractive force in a J-R type ESC is caused by the high electrical resistance that occurs in the contact region between an object plate and a dielectric layer. This research tries the simple geometrical modeling of the contact surface and simulates the contact resistance, the attractive force and the response time according to the variation of contact surface shape. In the latter half of this research, the simulation for a pin-combined chuck is accomplished using a similar surface modeling and the comparison between the pin chuck and the general flat chuck is made in aspects of the attractive force and the response time.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

1221-1224

DOI:

10.4028/www.scientific.net/KEM.326-328.1221

Citation:

J. S. Choi et al., "Physical Modeling and Characteristics of a Johnsen-Rahbek Type Electrostatic Chuck", Key Engineering Materials, Vols. 326-328, pp. 1221-1224, 2006

Online since:

December 2006

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Price:

$35.00

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