Improvement in the Sensitivity of the Response of Diamond Thin Films to X-Ray

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Due to some inferior performance of Chemical Vapor Deposition (CVD) diamond dosimeters, their applications are somewhat limited. The quality of diamond films was improved using Microwave Plasma CVD (MWPCVD) by the modified processes such as cyclic deposition and in-situ plasma post-treatment. The simple radiation dosimeters were fabricated in a sandwich configuration. Influence of purity and orientation of the diamond films on the sensitivity of the dosimeters was studied. The results indicate that the radiation dosimeters have high sensitivity to X-ray and the response of the devices is linear with the X-ray flux. The higher the purity of films is, the higher the resistivity and sensitivity are. The dosimeter based on [100] film has higher sensitivity than that based on [111] film. The dosimeter based on films prepared by cyclic deposition has higher sensitivity than that based on films prepared by the conventional deposition. The characterization of the response to X-ray also shows that in-situ oxygen plasma post-treatment leads to the higher sensitivity of dosimeters compared with in-situ nitrogen, hydrogen plasma post-treatments.

Info:

Periodical:

Key Engineering Materials (Volumes 336-338)

Edited by:

Wei Pan and Jianghong Gong

Pages:

1718-1721

DOI:

10.4028/www.scientific.net/KEM.336-338.1718

Citation:

X. M. Liao et al., "Improvement in the Sensitivity of the Response of Diamond Thin Films to X-Ray", Key Engineering Materials, Vols. 336-338, pp. 1718-1721, 2007

Online since:

April 2007

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$35.00

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