A Novel Ceramic Pressure Sensor
Constantan thin film was deposited on Al2O3 substrate by vacuum evaporation technology and semiconductor ordinary photolithography to form the sensitive bar of strain-resistance pressure sensor. The static characteristics of the resultant ceramic sensor were measured and the results showed that the linearity, repetition properties, return error and the creep of the ceramics pressure sensor are more excellent than the conventional sensor.
Wei Pan and Jianghong Gong
Y. Wan, P. Wan, "A Novel Ceramic Pressure Sensor", Key Engineering Materials, Vols. 336-338, pp. 772-774, 2007