Overview on Nanoimprint Technology - Process, Tools, Applications and Technical Issues for Industrialization

Hiroshi Goto

doi:10.4028/www.scientific.net/KEM.345-346.1073

Paper Titles

Irradiation Effect on Mechanical Properties and Oxidation Behavior of Nano-Filamentary Copper-Silver Composites
p.1055

Friction and Wear of Flange and Shaft in Compressor under the Environments of PAG Oil and Carbon Dioxide as a Refrigerant
p.1059

Experimental Study on Bonding Mechanism between Corroded Bolts and Grout
p.1063

Experimental Study on Degradation of 1Cr5Mo Steel Tubes in the Coking Furnace at Super Temperature
p.1067

Overview on Nanoimprint Technology - Process, Tools, Applications and Technical Issues for Industrialization
p.1073

Finite Element Analysis of the Forging Process of Magnesium Wheels
p.1079

Strain Loci in Stretch Flange Forming of Aluminum Alloys
p.1085

Powdering in Coating Layer of Galvannealed Nb-Ti Free Extra Low Carbon Steel Sheet
p.1089

Diameter Expansion Deformation Behaviors of Midair Shaft under Various Processing Conditions
p.1093

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Overview on Nanoimprint Technology - Process, Tools, Applications and Technical Issues for Industrialization

Abstract:

Nanoimprint process is a simple and a low cost micro/nano fabrication method based on mold replication principle. Various kinds of applications such as optical devices for flat panel displays or electronic papers, patterned medias, bio-medical devices and electronics devices using nanoimprint process are expected. In the past a decade, many researches and developments on the process, the tool, the application relating to nanoimprint were carried out and partly commercialized. In this paper, overview on nanoimprint technology including recent progress is described. And important issues to be solved and solution idea for industrialization of nanoimprint process are pointed out. Also, our recent R&D activities on nanoimprint tool and process, which are UV/thermal nanoimorint tool and process, roll to roll type imprint system are introduced.