In this work, the self-assembled monolayers of γ-aminopropyltrimethoxysilane and octadecyltrichlorosilane were prepared on titanium films, radiated and solidified by ultraviolet radiation/ozone photochemical process. The characterization and friction properties of titanium film, APS SAMs, OTS SAMs and the radiated APS SAMs, OTS SAMs were explored by atomic force microscopy and friction force microscopy. The effects of functional groups, sliding velocity, load and ultraviolet radiation/ozone photochemical process on friction properties of SAMs were analyzed. The experimental results show that the titanium film coated with SAMs, especially under ultraviolet radiation/ozone, is exhibited with a good friction property. The friction property of APS SAMs is better than OTS SAMs under or no ultraviolet radiation/ozone. The friction force increases with the increasing of sliding velocity and decreases with the increasing of load.