Study on the Polishing Mechanism of Low Temperature Co-Fired Ceramic for Microsystem Application

Abstract:

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Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining increasing interests in the manufacturing of highly-integrated systems for microelectronic and micro-system applications. The polishing experiments of sintered LTCC using a custom-built precision polishing machine are reported in this paper. First, a micro-fluidic distributor was fabricated using LTCC. Then, the polishing of this meso-MEMS system was studied using several polishing parameters. By optimizing the polishing parameters, the surface roughness can be reduced to 4 nm.

Info:

Periodical:

Key Engineering Materials (Volumes 375-376)

Edited by:

Yingxue Yao, Xipeng Xu and Dunwen Zuo

Pages:

47-51

DOI:

10.4028/www.scientific.net/KEM.375-376.47

Citation:

J. J. Zhu et al., "Study on the Polishing Mechanism of Low Temperature Co-Fired Ceramic for Microsystem Application ", Key Engineering Materials, Vols. 375-376, pp. 47-51, 2008

Online since:

March 2008

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Price:

$35.00

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