Study on the Polishing Mechanism of Low Temperature Co-Fired Ceramic for Microsystem Application

Abstract:

Article Preview

Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining increasing interests in the manufacturing of highly-integrated systems for microelectronic and micro-system applications. The polishing experiments of sintered LTCC using a custom-built precision polishing machine are reported in this paper. First, a micro-fluidic distributor was fabricated using LTCC. Then, the polishing of this meso-MEMS system was studied using several polishing parameters. By optimizing the polishing parameters, the surface roughness can be reduced to 4 nm.

Info:

Periodical:

Key Engineering Materials (Volumes 375-376)

Edited by:

Yingxue Yao, Xipeng Xu and Dunwen Zuo

Pages:

47-51

DOI:

10.4028/www.scientific.net/KEM.375-376.47

Citation:

J. J. Zhu et al., "Study on the Polishing Mechanism of Low Temperature Co-Fired Ceramic for Microsystem Application ", Key Engineering Materials, Vols. 375-376, pp. 47-51, 2008

Online since:

March 2008

Export:

Price:

$38.00

[1] R. Rautioaho, O. Nousianen, T. Saven, S. Leppavuon and J. Lenkken: Microelectronics Reliability, Vol. 40 (2000), p.1527.

[2] Y.G. Wang, G.N. Zhang and J.S. Ma: Materials Science & Engineering, Vol. B94 (2002), p.48.

[3] P.K. Khanna, B. Hornbostel, R. Grimme, W. Schafer and J. Dorner: Materials Chemistry & Physics, Vol. 87 (2004), p.173.

[4] D.J. Sadler, C. Rajnish, P. Roberts, F.C. Chia and Z. Frederic: IEEE Transactions on Components and Packaging Technologies, Vol. 26 (2003) No. 2, p.309.

[5] J.H. Zhang, M.Q. Yi, and H. Bau: Sensors & Actuators, Vol. A96 (2002), p.59.

[6] K. Saxena, F. Barlow, V. Wang, S. Ang and A. Elshabini: The Next Generation II & Tabletop Exhibition (Denver, USA, April 26-28, 2004).

[7] J.J. Zhu, J. Cheng and S. Ang: Journal of Physics, (2006).

In order to see related information, you need to Login.