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Investigation on Strain Films in the Thin Film Resistance Strain Gauge

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Abstract:

Strain films in the thin film resistance strain gauge are prepared by magnetron sputtering method. Some results concerning the electromechanical and structural properties of nichrome (Ni80Cr20 wt.%) thin films are presented. As compared to the well-known Ni-Cu (constantan) alloy film, which are widely used for manufacturing pressure and force sensors, nichrome (Ni80Cr20 wt.%) thin films exhibit gauge factor values of the same order of magnitude, but they are much more corrosion resistant and adherent to the substrate. The influences of composition and post-deposition annealing on the electrical resistance, temperature coefficient of resistance (TCR) and gauge factor of nichrome (Ni80Cr20 wt.%) thin films are discussed.

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Advances in Machining & Manufacturing Technology IX View Preview

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Periodical:

Key Engineering Materials (Volumes 375-376)

Pages:

690-694

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.375-376.690

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Online since:

March 2008

Authors:

Rong Fa Chen, Dun Wen Zuo, Yu Li Sun, Duo Sheng Li, Wen Zhuang Lu, Min Wang

Keywords:

Electromechanical Properties, Nichrome Thin Film, Thin Film Resistance Strain Gauge

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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