Investigation on Strain Films in the Thin Film Resistance Strain Gauge

Abstract:

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Strain films in the thin film resistance strain gauge are prepared by magnetron sputtering method. Some results concerning the electromechanical and structural properties of nichrome (Ni80Cr20 wt.%) thin films are presented. As compared to the well-known Ni-Cu (constantan) alloy film, which are widely used for manufacturing pressure and force sensors, nichrome (Ni80Cr20 wt.%) thin films exhibit gauge factor values of the same order of magnitude, but they are much more corrosion resistant and adherent to the substrate. The influences of composition and post-deposition annealing on the electrical resistance, temperature coefficient of resistance (TCR) and gauge factor of nichrome (Ni80Cr20 wt.%) thin films are discussed.

Info:

Periodical:

Key Engineering Materials (Volumes 375-376)

Edited by:

Yingxue Yao, Xipeng Xu and Dunwen Zuo

Pages:

690-694

DOI:

10.4028/www.scientific.net/KEM.375-376.690

Citation:

R. F. Chen, D. W. Zuo, Y. L. Sun, D. S. Li, W. Z. Lu, M. Wang, "Investigation on Strain Films in the Thin Film Resistance Strain Gauge", Key Engineering Materials, Vols. 375-376, pp. 690-694, 2008

Online since:

March 2008

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Price:

$35.00

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