The Influence of Form Deviations and Surface Topography of Micro-Components on the Uncertainty of their Geometrical Parameters

Abstract:

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The uncertainty of dimensional measurements is influenced by numerous different sources, such as the properties of the instrument used, the environmental conditions, the interaction between sensor and surface, and the object properties themselves. In our contribution we focus on the influence of form deviations and surface topography. This influence will be demonstrated by some characteristic examples of micro-component measurements and by the analysis of simulated 2D-data.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

649-652

DOI:

10.4028/www.scientific.net/KEM.381-382.649

Citation:

M. Neugebauer and M. P. Krystek, "The Influence of Form Deviations and Surface Topography of Micro-Components on the Uncertainty of their Geometrical Parameters", Key Engineering Materials, Vols. 381-382, pp. 649-652, 2008

Online since:

June 2008

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Price:

$35.00

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