The Influence of Form Deviations and Surface Topography of Micro-Components on the Uncertainty of their Geometrical Parameters

Michael Neugebauer; Michael Paul Krystek

doi:10.4028/www.scientific.net/KEM.381-382.649

Paper Titles

Investigation on the Noise Separation in Watt Balance Experiments
p.619

Advanced Analog-to-Digital Conversion Using Voltage-to-Frequency Converters for Remote Sensors
p.623

Correlation Processing of the Signals of the Single-Fiber Intermode Interferometer with a Small Number of Excited Modes
p.627

Research on Automatic Flaw Classification and Feature Extraction of Ultrasonic Testing
p.631

Simulation of Profiles of Normal Ordinate Distribution
p.635

Processing Speed Acceleration of an Intelligent Communication Instrument
p.639

The Design and Use of F1 Softgauges for Validating Surface Metrology Software
p.643

Instruction Scheduling on a Pipelined Processor for Mechanical Measurements
p.647

The Influence of Form Deviations and Surface Topography of Micro-Components on the Uncertainty of their Geometrical Parameters
p.649

HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382The Influence of Form Deviations and Surface...

The Influence of Form Deviations and Surface Topography of Micro-Components on the Uncertainty of their Geometrical Parameters

Abstract:

The uncertainty of dimensional measurements is influenced by numerous different sources, such as the properties of the instrument used, the environmental conditions, the interaction between sensor and surface, and the object properties themselves. In our contribution we focus on the influence of form deviations and surface topography. This influence will be demonstrated by some characteristic examples of micro-component measurements and by the analysis of simulated 2D-data.

You might also be interested in these eBooks

Measurement Technology and Intelligent Instruments VIII

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Pages:

649-652

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.381-382.649

Citation:

Cite this paper

Online since:

June 2008

Authors:

Michael Neugebauer, Michael Paul Krystek

Keywords:

Data Analysis, Form Influence, Micro Metrology, Uncertainty

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Leach R K 2003 Proceedings of the euspen International Topical Conference on Micro Technology, Aachen, Germany, 3-10.

Google Scholar

[2] Häßler-Grohne W, Frase C G, Czerkas S, Discherl K, Bodermann B, Buhr E, Ehret G, Wurm M, Bosse H 2006 Proceedings of the 6th euspen International Conference, Baden bei Wien, 374-377.

Google Scholar

[3] www. imm-mainz. de.

Google Scholar

[4] www. alicona. com.

Google Scholar