Novel High-Precision Pitch Artifact Using Balls
In this research, a novel high-precision pitch artifact using balls is proposed for calibration of pitch measuring instruments. This pitch artifact is composed of the combination and the alignment of balls and cylinders on a plane. Balls, cylinders and planes are possible to be manufactured with several-ten-nanometer-order accuracy. Therefore, this artifact can accomplish high dimensional accuracy. In addition, manufacturing of this artifact is not difficult because time-consuming special process is not needed. In this report, the concept, structure and feature of this pitch artifact are proposed and theoretical analysis is carried out.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
M. Komori et al., "Novel High-Precision Pitch Artifact Using Balls", Key Engineering Materials, Vols. 381-382, pp. 95-96, 2008