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Novel High-Precision Pitch Artifact Using Balls

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Abstract:

In this research, a novel high-precision pitch artifact using balls is proposed for calibration of pitch measuring instruments. This pitch artifact is composed of the combination and the alignment of balls and cylinders on a plane. Balls, cylinders and planes are possible to be manufactured with several-ten-nanometer-order accuracy. Therefore, this artifact can accomplish high dimensional accuracy. In addition, manufacturing of this artifact is not difficult because time-consuming special process is not needed. In this report, the concept, structure and feature of this pitch artifact are proposed and theoretical analysis is carried out.

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Measurement Technology and Intelligent Instruments VIII View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Pages:

95-96

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.381-382.95

Citation:

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Online since:

June 2008

Authors:

Masaharu Komori, Sonko Osawa, Osamu Sato, T. Kiten, D. Shirasaki, Toshiyuki Takatsuji

Keywords:

Angle, Artifact, Calibration, Dimensional Measurement, Pitch

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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References

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