Novel High-Precision Pitch Artifact Using Balls

Abstract:

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In this research, a novel high-precision pitch artifact using balls is proposed for calibration of pitch measuring instruments. This pitch artifact is composed of the combination and the alignment of balls and cylinders on a plane. Balls, cylinders and planes are possible to be manufactured with several-ten-nanometer-order accuracy. Therefore, this artifact can accomplish high dimensional accuracy. In addition, manufacturing of this artifact is not difficult because time-consuming special process is not needed. In this report, the concept, structure and feature of this pitch artifact are proposed and theoretical analysis is carried out.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

95-96

DOI:

10.4028/www.scientific.net/KEM.381-382.95

Citation:

M. Komori et al., "Novel High-Precision Pitch Artifact Using Balls", Key Engineering Materials, Vols. 381-382, pp. 95-96, 2008

Online since:

June 2008

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Price:

$35.00

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