The purpose of this study is to make clear the machining effect of the precision abrasive machining using the cavitation in reversing suction flow, which can easily finish to a fine surface by a simple apparatus. The machining fluid including loose micro abrasive grains is sucked by a pump, and the cavitation occurs ahead of the nozzle fixed in the suction chamber because of the rapid decrease of pressure of machining fluid. We use the cavitation impact to make the abrasive grains to interfere with the workpiece surface. In this report, the possibility of application of the new abrasive machining to the precision manufacturing is investigated by analyzing the behavior of machining fluid, the stock removal and the surface finish in machining of glass. The cavitation impact is strongest under the nozzle clearance of 20mm and restriction nozzle diameter of 4mm. Glass surface is finished up to several nanometers in Ry with slight stock removal by the proposed abrasive machining.