Advances in Concrete and Structures
Vols. 400-402
Vols. 400-402
Advances in Strength of Materials
Vol. 399
Vol. 399
Bioceramics 21
Vols. 396-398
Vols. 396-398
Progress in High Temperature Ceramics
Vol. 395
Vol. 395
Manufacturing Automation Technology
Vols. 392-394
Vols. 392-394
Progress in Sol-Gel Production
Vol. 391
Vol. 391
Advances in Abrasive Technology XI
Vols. 389-390
Vols. 389-390
Electroceramics in Japan XI
Vol. 388
Vol. 388
Advances in Fracture and Damage Mechanics VII
Vols. 385-387
Vols. 385-387
Progress in Surface Treatment
Vol. 384
Vol. 384
Progress in Fracture and Damage Mechanics
Vol. 383
Vol. 383
Measurement Technology and Intelligent Instruments VIII
Vols. 381-382
Vols. 381-382
Innovation in Materials Science
Vol. 380
Vol. 380
Advances in Abrasive Technology XI
Volumes 389-390
Paper Title Page
Abstract: A novel method is reported for predicting the distribution of normal and tangential
grinding forces in wheel and workpiece contact zone or along their contact arc. This work was
motivated by the need to obtain the maximum force acting on individual active abrasive grains for
establishing the probability of grain fracture and pullouts due to this force. Horizontal and vertical
forces measured in the transient cut-in or cut-out stage of a grinding pass are utilized in this method
to predict the horizontal and vertical forces acting on each portion of the contact arc. And then these
forces are subsequently converted to tangential and normal forces per unit length along the arc to
obtain the force distribution. To illustrate the application of this method, forces measured in the
transient cut-out stage in the grinding of tungsten carbide with electroplated diamond wheels were
employed to predict the force distribution, which was further applied to predicting the transient
grinding power at the cut-in and cut-out stages. The predicted power was found to match very well
with the measured power.
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Abstract: Single crystal MgO can be used as the substrates to deposit HTS films. The subsurface
damage (SSD) generated in processing has great effect on the strength and performance of the
substrates. However, the characteristics of MgO SSD and its formation mechanism have not been
understood fully. In this paper, the surface and subsurface damage caused by saw cutting, rough
lapping and fine lapping of MgO substrates were studied by cross-section of microscopy and SEM.
The formation mechanism was discussed; and a SSD model was presented.
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Abstract: Silicon wafer thinning process is meeting great challenges to fulfill requirements of
ultra-thin IGBT for automotive applications. Chemo-mechanical grinding (CMG) process is
potentially emerging stress relief thinning process which combines the advantages of fixed abrasive
machining and chemical mechanical polishing (CMP). A major issue in CMG of Si wafers is the
relatively low material removal rate (MRR). This paper studies the influence of the wheel
specifications and grinding conditions on the MRR of CMG. Two sets of three-factor two-level full
factorial designs of experiment (DOE)[1] are employed to reveal the main effects and interacted
effects of CMG wheel specifications and grinding parameters on MRR. The optimal combination
scenarios for improving MRR of CMG are analysized and obtained. By use of the optimal CMG
wheel and grinding parameters, the MRR of more than 60nm/min is achieved.
13
Abstract: Ceramics has many advantages that cannot be substituted by metals, but its machining
induced defects, such as crack and crater, are the obstacle of using ceramics in engineering. Thus,
the further studies on the materials removal mechanism of ceramics should be done. As known, the
cutting theory of metals is very successful and it is helpful to understand the material removal
mechanism of ceramics. Through doing comparative experiments, the material removal mechanism
of ceramics may be more deeply ascertained. Four types of material, such as ZrO2, SiC, STAVAX
and SKD11, were ground by ELID (ELectrolytic In-process Dressing) method in this study. The
grinding forces, roughness and topography of the ground surface were investigated. On the basis of
this experiment, the difference of material removal mechanism between ceramics and steels was
explained.
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Abstract: Aiming at solving the problems of wheel loading in dry grinding of Carbon/Epoxy
composite materials, a novel electroplated grinding wheel with controlled abrasive cluster was
developed, in which the diameter of clusters is in Φ0.2 mm to Φ1.0 mm and the interspace between
them is about 0.5 mm to 1.0 mm. A conventional electroplated grinding wheel with abrasive grains
distributed randomly was fabricated in the same way. The comparison experiments involving C/E
composite were conducted on a vertical spindle grinder with the novel and conventional grinding
wheels. The results show that the grinding forces of novel wheel developed is more lower though
little larger surface roughness, and the wheel loading phenomenon is markedly decreased compared
with conventional electroplated wheel.
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Abstract: The elastic and/or plastic behaviors of glass quartz, the most popular optical material and a
hard and brittle material, were studied experimentally from two points of view; static mode and
dynamic mode. The static behaviors were investigated by a nanoindentation test and the dynamic
behaviors were investigated by a single-point fly cutting (SPFC) test. In the experiments, copper was
selected as a material representing soft and ductile materials. From the experiments it was found that
the plastic deformation ratio of glass quartz is smaller than that of copper depending on the SPFC
conditions, and the area coefficient of the pile-up has the same tendency for both glass quartz and
copper.
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Abstract: A 3D profiler based on scanning white light interferometry with a lateral sampling interval
of 0.11μm was introduced to measure the surface topography of a #3000 diamond grinding wheel,
and a large sampling area could be achieved by its stitching capability without compromising its
lateral or vertical resolution. The protrusion height distribution of diamond grains and the static
effective grain density of the grinding wheel were derived, and the wheel chatter and the deformation
of the wheel were analyzed as well. The study shows that the grain protrusion height obeys an
approximate normal distribution, the static effective grain density is much lower than the theoretical
density, and only a small number of diamond grains are effective in the grinding process with fine
diamond grinding wheel. There exists waviness on the grinding wheel surface parallel with the wheel
cutting direction. The cutting surface of the grinding wheel is not flat but umbilicate, which indicates
that the elastic deformation at the wheel edges is much larger than in the center region.
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