Thermal Conductivity Measurement of the AlN Ceramics at the Grain Scale Using Thermoreflectance Technique

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Abstract:

The thermal conductivity at the micrometer-scale of AlN ceramics with eliminated grain boundary phase was measured by the thermoreflectance technique with periodic heating. Thermal conductivities were ranged from 160 to 260 W/m•K and an average value of 201 W/m•K was obtained from a 22 m2 area. The variation in the thermal conductivities was related to the individual AlN grains and grain boundary characteristics.

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65-67

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December 2008

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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